Venue FACTS@ABN (ABN-B4b-10), TELS Room Lecture Theatre at The ARC (LHN-B1-15)
Organiser FACTS (Email : facts@ntu.edu.sg Tel/Fax : 65921813)
Event Info
This course offers an introduction to Focused Ion Beam-Scanning Electron Microscopy (FIB-SEM), from its historical development to cutting-edge applications. Participants will learn about different ion sources (e.g. LMIS, plasma), electron-/ ion-solid interactions, sputtering yield, and gas-assisted deposition/etching processes. Key applications such as TEM lamella preparation, cross-sectioning, 3D tomography, and nanopatterning will be highlighted. The course also covers advanced FIB-SEM workflows, including multimodal analysis with 3D EDS, EBSD, and ToF-SIMS tomography for comprehensive material characterization. Designed for both beginners and experienced users, the session provides valuable insights into FIB-SEM’s pivotal role in nanofabrication, materials science, and failure analysis.
Speaker:
Dr Xi Lifei
Senior Research Fellow, FACTS, NTU Singapore
*** For non-NTU staff/student who would like to attend this course, please email Weiling at liuwl@ntu.edu.sg. Thank you!